Model-Based Eddy Current Determination of the Electrical Conductivity of Semiconductors

The purpose of this paper is the development of a procedure for the determination of the electrical conductivity of semiconductor wafers using the eddy current technique. The conductivity estimation is based on an analytical model and done according to two approaches: direct and iterative inversion.

Mots clés

model-based eddy current determination electrical conductivity semiconductor wafers eddy current technique conductivity estimation direct inversion iterative inversion

Domaines

Sciences de l'ingénieur [physics]

Yann Le Bihan : Connectez-vous pour contacter le contributeur

https://hal.science/hal-01460536

Soumis le : mardi 7 février 2017-16:59:29

Dernière modification le : vendredi 24 mars 2023-14:53:03

Dates et versions

hal-01460536 , version 1 (07-02-2017)

Identifiants

HAL Id : hal-01460536 , version 1
DOI : 10.1109/cefc.2016.7816375

Citer

Yann Le Bihan, Florent Loete, Josué Ferreira, Denis Mencaraglia. Model-Based Eddy Current Determination of the Electrical Conductivity of Semiconductors. 2016 IEEE Conference on Electromagnetic Field Computation (CEFC), Nov 2016, Miami, United States. ⟨10.1109/cefc.2016.7816375⟩. ⟨hal-01460536⟩

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