Robust Multi-Parameter Sensing Probe for Water Monitoring Based on ALD-Coated Metallic Micro-patterns and Carbon Nanotube Printing - Archive ouverte HAL Access content directly
Conference Papers Year : 2016

Robust Multi-Parameter Sensing Probe for Water Monitoring Based on ALD-Coated Metallic Micro-patterns and Carbon Nanotube Printing

Abstract

We report on a multi-sensing probe for water network monitoring enabling simultaneous measurement of water electrical conductivity, flow-rate, temperature and pH. A very simple fabrication process is used where all physical sensors are obtained only from micro-patterning of glass, combining platinum, gold. Further coating using Atomic Layer Deposition (ALD) is achieved for the purpose of reducing both electro-erosion and biofouling, while keeping the sensor's electrical and thermal functionalities. This is critical for long-term reliability of sensors immersed in water. Carbon nanotubes are then inkjet-printed last for the pH sensor. Lateral size of each sensing elements does not exceed a few 100µm. This small footprint allowed implementing a redundancy strategy on the chip, not only for reliability purposes but also to accommodate for different measurement ranges based on scalable designs.
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Dates and versions

hal-01395020 , version 1 (10-11-2016)

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Massimo Pellegrino, William Cesar, Frédéric Marty, Martine Capo Chichi, Bérengère Lebental, et al.. Robust Multi-Parameter Sensing Probe for Water Monitoring Based on ALD-Coated Metallic Micro-patterns and Carbon Nanotube Printing. IEEE NEMS 2016 - The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Apr 2016, Matsushima Bay, Japan. 2p, ⟨10.1109/NEMS.2016.7758263⟩. ⟨hal-01395020⟩
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