Laterally Ordered Sub-10 nm Features Obtained From Directed Self-Assembly of Si-Containing Block Copolymer Thin Films - Archive ouverte HAL
Article Dans Une Revue Small Année : 2015

Laterally Ordered Sub-10 nm Features Obtained From Directed Self-Assembly of Si-Containing Block Copolymer Thin Films

Cristian Mocuta

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hal-01361284 , version 1 (07-09-2016)

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Yecheol Rho, Karim Aissou, Muhammad Mumtaz, Wonsang Kwon, Gilles Pecastaings, et al.. Laterally Ordered Sub-10 nm Features Obtained From Directed Self-Assembly of Si-Containing Block Copolymer Thin Films. Small, 2015, 11 (48), pp.6377-6383. ⟨10.1002/smll.201500439⟩. ⟨hal-01361284⟩
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