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Poster De Conférence Année : 2015

Study of energy transfers at the substrate during transition steps in reactive magnetron sputter deposition

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Matériaux
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Dates et versions

hal-01290717 , version 1 (18-03-2016)

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  • HAL Id : hal-01290717 , version 1

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El Mokh Mariem, Amaël Caillard, Nadjib Semmar, Thomas Lecas, Anne-Lise Thomann. Study of energy transfers at the substrate during transition steps in reactive magnetron sputter deposition. 4th MIATEC and 14th RDS 2015 , Dec 2015, Paris, France. ⟨hal-01290717⟩
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