On the relationship between the energy flux at the substrate surface and the phase constitution of reactively magnetron sputtered titanium dioxide thin films - Archive ouverte HAL Accéder directement au contenu
Poster De Conférence Année : 2014
Fichier non déposé

Dates et versions

hal-01289438 , version 1 (16-03-2016)

Identifiants

  • HAL Id : hal-01289438 , version 1

Citer

Stephanos Konstantinidis, Pierre-Antoine Cormier, Anne-Lise Thomann, Remi Dussart, Nadjib Semmar, et al.. On the relationship between the energy flux at the substrate surface and the phase constitution of reactively magnetron sputtered titanium dioxide thin films. 14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany. ⟨hal-01289438⟩
34 Consultations
0 Téléchargements

Partager

Gmail Facebook X LinkedIn More