A combined photoluminescence and electron paramagnetic resonance study of low energy electron irradiated 4H SiC
Résumé
Several 4H SiC samples have been electron-irradiated at near threshold energies at low fluence, either along the [00011 or [000-1] direction. PL and EPR techniques have been used to investigate the dependence of the beam direction on defect generation and, together with a sample irradiated at a higher fluence, to correlate differences brought about by irradiating with a change in electron fluence. Attempts are made to correlate the information derived from the two techniques.