Polymer film deposition of TMDSO using an Atmospheric Pressure DBD plasma
jet

The present work deals with plasma polymerisation of TetraMethylDiSilOxane with a Dielectric Barier Discharge plasma jet at atmospheric pressure. Depending on parameters like voltage, frequency, carrier gas and monomer injection, the deposited polymer looks like gel film or transparent film with fringes. Deposits are characterized by Fourier Transformed IR spectroscopy and contact angle measurements. Keywords: Atmospheric pressure DBD plasma jet, Low temperature, Plasma polymerisation, TetraMethylDiSilOxane.

Keywords

Plasma Jet and DBD Plasma Gun Polymer film deposition Atmospheric Plasma

Domains

Engineering Sciences [physics] Plasmas Chemical and Process Engineering

Jean-Michel POUVESLE : Connect in order to contact the contributor

https://hal.science/hal-01254738

Submitted on : Tuesday, January 12, 2016-4:06:10 PM

Last modification on : Wednesday, June 5, 2024-3:23:27 AM

Dates and versions

hal-01254738 , version 1 (12-01-2016)

Identifiers

HAL Id : hal-01254738 , version 1

Cite

Céline Vivien, Eric Robert, Jean-Michel Pouvesle, Philippe Supiot. Polymer film deposition of TMDSO using an Atmospheric Pressure DBD plasma jet. 22nd International Symposium on Plasma Chemistry ISPC 22, Jul 2015, Antwerp, Belgium. ⟨hal-01254738⟩

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CNRS UNIV-VALENCIENNES UNIV-ORLEANS IEMN GREMI UNIV-LILLE

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