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Poster De Conférence Année : 2015

Polymer film deposition of TMDSO using an Atmospheric Pressure DBD plasma jet

Résumé

The present work deals with plasma polymerisation of TetraMethylDiSilOxane with a Dielectric Barier Discharge plasma jet at atmospheric pressure. Depending on parameters like voltage, frequency, carrier gas and monomer injection, the deposited polymer looks like gel film or transparent film with fringes. Deposits are characterized by Fourier Transformed IR spectroscopy and contact angle measurements. Keywords: Atmospheric pressure DBD plasma jet, Low temperature, Plasma polymerisation, TetraMethylDiSilOxane.
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Dates et versions

hal-01254738 , version 1 (12-01-2016)

Identifiants

  • HAL Id : hal-01254738 , version 1

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Céline Vivien, Eric Robert, Jean-Michel Pouvesle, Philippe Supiot. Polymer film deposition of TMDSO using an Atmospheric Pressure DBD plasma jet. 22nd International Symposium on Plasma Chemistry ISPC 22, Jul 2015, Antwerp, Belgium. ⟨hal-01254738⟩
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