Nanocomposite oxide thin films grown by pulsed energy beam deposition - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Applied Surface Science Année : 2011

Nanocomposite oxide thin films grown by pulsed energy beam deposition

M. Nistor
W. Seiler
  • Fonction : Auteur

Résumé

Highly non-stoichiometric indium tin oxide (ITO) thin films were grown by pulsed energy beam deposition (pulsed laser deposition-PLD and pulsed electron beam deposition-PED) under low oxygen pressure. The analysis of the structure and electrical transport properties showed that ITO films with a large oxygen deficiency (more than 20%) are nanocomposite films with metallic (In, Sn) clusters embedded in a stoichiometric and crystalline oxide matrix. The presence of the metallic clusters induces specific transport properties, i.e. a metallic conductivity via percolation with a superconducting transition at low temperature (about 6 K) and the melting and freezing of the In-Sn clusters in the room temperature to 450 K range evidenced by large changes in resistivity and a hysteresis cycle. By controlling the oxygen deficiency and temperature during the growth, the transport and optical properties of the nanocomposite oxide films could be tuned from metallic-like to insulating and from transparent to absorbing films. (C) 2010 Elsevier B.V. All rights reserved.

Dates et versions

hal-01240945 , version 1 (09-12-2015)

Identifiants

Citer

M. Nistor, A. Petitmangin, Christian Hebert, W. Seiler. Nanocomposite oxide thin films grown by pulsed energy beam deposition. Applied Surface Science, 2011, 257 (12), pp.5337-5340. ⟨10.1016/j.apsusc.2010.11.139⟩. ⟨hal-01240945⟩
34 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More