Comparative study of structural and morphological properties of nanostructured CuIn2n+1 S3n+2 (n=0, 1 and 2) thin films produced by oblique angle deposition - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue European Physical Journal: Applied Physics Année : 2013

Comparative study of structural and morphological properties of nanostructured CuIn2n+1 S3n+2 (n=0, 1 and 2) thin films produced by oblique angle deposition

Azza Sinaoui
  • Fonction : Auteur
Naoufel Khemiri
  • Fonction : Auteur
Ferid Chaffar-Akkari
  • Fonction : Auteur
Bruno Gallas
Mounir Kanzari
  • Fonction : Auteur

Résumé

CuInS2, CuIn3S5 and CuIn5S8 films were grown by thermal evaporation using oblique angle deposition technique. During the deposition, the substrate temperature was maintained at Ts = 150 degrees C and the deposition angle was fixed at alpha = 0 degrees and 85 degrees. The powders and thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). From the XRD data of powders, we calculated the lattice parameters of the structure for the different compounds. XRD patterns of thin films revealed that all samples deposited at a = 0. were polycrystalline. Indeed, CuInS2 and CuIn3S5 films had a chalcopyrite structure with preferred orientation along (1 1 2) while CuIn5S8 films exhibit a spinel structure with preferred orientation along (3 1 1). However, CuIn2n+1 S3n+2 with n = 0, 1 and 2 films deposited at a = 85. were amorphous in nature. The surface and cross-section of the films were observed by AFM and SEM. The oblique angle deposition films showed an inclined columnar structure, with columns tilting in the direction of the incident flux. The surface roughness of the different films deposited, respectively, at a = 0 degrees and 85 degrees was determined by two methods (AFM and spectrophotometric analysis). The obtained values show an increase of the surface roughness by increasing the deposition angle a.

Dates et versions

hal-01240528 , version 1 (09-12-2015)

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Azza Sinaoui, Naoufel Khemiri, Ferid Chaffar-Akkari, Bruno Gallas, Mounir Kanzari. Comparative study of structural and morphological properties of nanostructured CuIn2n+1 S3n+2 (n=0, 1 and 2) thin films produced by oblique angle deposition. European Physical Journal: Applied Physics, 2013, 64 (2), pp.UNSP 20301. ⟨10.1051/epjap/2013130366⟩. ⟨hal-01240528⟩
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