We have obtained a 40 nm parameter crystalline monolayer of a semifluorinated alkane on a silicon wafer using the spin-coating technique. Its structure, analyzed by atomic force microscopy (AFM), is identical to that recently observed at the air-water interface, showing the existence of hexagonal nanodomains, organized on a long range order hexagonal lattice of a few tens of nanometers lateral parameter. Considering AFM images published on films transferred by the usual Langmuir-Blodgett method, one can note that the monolayers form locally ordered rounded domains. With our procedure, the original highly organized large crystalline structure is recovered. (C) 2010 Elsevier B.V. All rights reserved.