Pb(Zr,Ti)03 ceramic thick films for optical device applications
Résumé
Ferroelectric Pb,ZrTi1O3 (PZT) has been prepared by chemical solution deposition (CSD) and spin-coating technique, using acetate and alkoxide precursors. Rapid thermal annealing has been employed in order to obtain crystallization in the perovskite phase. Aiming to study the optical properties of the films, PZT was deposited on different glass substrates. Structural characterization ofthe films was done by X-ray diffraction, morphology was investigated by SEM micrography. Using standard photography analysis, the films were qualified in terms of crack density, their appearance strongly depending on the type of substrate. Using a visible to the near infrared spectrophotometer, the transmittance normal to the surface ofthe films was studied. Coupling oflaser light into the films by the M-lines technique allowed the determination of the refractive index and the thickness of the ferroelectric layer. A waveguiding interferometer structure of Mach-Zehnder type was realized by photolithography and wet chemical etching.
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