Electrical characterization of ultra-thin silicon-on-insulator substrates : static and split C–V measurements in the Pseudo–MOSFET configuration - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2013
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hal-01182173 , version 1 (30-07-2015)

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  • HAL Id : hal-01182173 , version 1

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Piro L., Diab A., Ionica I., Gérard Ghibaudo, Cristoloveanu S.. Electrical characterization of ultra-thin silicon-on-insulator substrates : static and split C–V measurements in the Pseudo–MOSFET configuration. 4th Int. Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Technology (ULSIC ), Jul 2013, Villard de Lans, France. pp.203-208. ⟨hal-01182173⟩
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