Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2013

Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes

Fichier non déposé

Dates et versions

hal-01166024 , version 1 (22-06-2015)

Identifiants

  • HAL Id : hal-01166024 , version 1

Citer

Pierre-Antoine Cormier, A. Balhamri, Anne Lise Thomann, Remi Dussart, Nadjib Semmar, et al.. Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes. 19th International Vacuum Conference, Sep 2013, Paris, France. ⟨hal-01166024⟩
19 Consultations
0 Téléchargements

Partager

Gmail Facebook X LinkedIn More