Concentration determination and activation of rare earth dopants in zinc oxide thin films
Résumé
In this paper, we will present the development of rareearth
(RE) doped zinc oxide (ZnO) films for white light
emitting diodes (LED). We will present the structural
changes of these films as well as their optical properties
and associated photoluminescence before and after rapid
thermal treatments. We will report depth profile results
from plasma profiling time of flight mass spectrometry
(PP-TOFMS) giving the distributions and concentrations
of the different elements in the films. We will correlate
depth profile and luminescence data to understand the RE
emission mechanisms in ZnO matrix.