Concentration determination and activation of rare earth dopants in zinc oxide thin films
Résumé
In this paper, we will present the development of rareearth (RE) doped zinc oxide (ZnO) films for white light emitting diodes (LED). We will present the structural changes of these films as well as their optical properties and associated photoluminescence before and after rapid thermal treatments. We will report depth profile results from plasma profiling time of flight mass spectrometry (PP-TOFMS) giving the distributions and concentrations of the different elements in the films. We will correlate depth profile and luminescence data to understand the RE emission mechanisms in ZnO matrix.