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Communication Dans Un Congrès Année : 2003

Relevant diffracted orders selection in optical characterization of grating by use of neural network

S. Robert
Alain Mure-Ravaud
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hal-01125114 , version 1 (06-03-2015)

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  • HAL Id : hal-01125114 , version 1

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S. Robert, Alain Mure-Ravaud, Meziane Yacoub, Sylvie Thiria. Relevant diffracted orders selection in optical characterization of grating by use of neural network. First European Scatterometry Workshop, Ile de Porquerolles, France, Jan 2003, Porquerolles, France. ⟨hal-01125114⟩
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