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Communication Dans Un Congrès Année : 2014

Time resolved study of the HiPIMS postdischarge

Résumé

This study deals with the investigation of post-discharges resulting from a pulsed magnetron sputtering process. To vary the working conditions in a large range, different sputtering targets and gases are used. The diagnosis of the post-discharge is mainly achieved by a Retarded Field Energy Analyzer (RFEA) and a mass spectrometer. These two techniques enable time resolved characterization of the post-discharge. The study will focus on the ion beam collected under specific HiPIMS regimes as well as the influence of the sputtering target material.

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Plasmas
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Dates et versions

hal-01058496 , version 1 (27-08-2014)

Identifiants

  • HAL Id : hal-01058496 , version 1

Citer

Stéphane Cuynet, M. Palmucci, Amaël Caillard, Thomas Lecas, Anne-Lise Thomann, et al.. Time resolved study of the HiPIMS postdischarge. 20th International Conference on Gas Discharges and their Applications (GD2014), Jul 2014, Orléans, France. pp.E-12. ⟨hal-01058496⟩
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