A novel deep-UV polymer for integrated photonics: waveguides structures towards cascade of multiple micro-resonators
Résumé
An overview of targeted current research on integrated photonics based on the new deep-UV210 organic material is given. We report on the interest in this new material and properties coupled to deep-ultraviolet (DUV) lithography processes towards the realization and optical characterization of sundry photonics structures. Such structures include sub-wavelength waveguides, pedestal and tapers waveguides until serial of optical micro-resonators (MRs) shaped as disk, ring, stadium and racetrack.
Domaines
Optique / photonique
Origine : Accord explicite pour ce dépôt