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Communication Dans Un Congrès Année : 2014

Characterization of cascade of multiple resonators developed on UV210 positive photoresist by DUV lithography

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hal-01020848 , version 1 (08-07-2014)

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  • HAL Id : hal-01020848 , version 1

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Roberto Castro-Beltran, Nolwenn Huby, Hervé Lhermite, Goulc'Hen Loas, David Pluchon, et al.. Characterization of cascade of multiple resonators developed on UV210 positive photoresist by DUV lithography. Latin America Optics and Photonics Conference, Jul 2014, Cancun, Mexico. ⟨hal-01020848⟩
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