Improvement of the mechanical and tribological properties of Cr-N system obtained by reactive gas pulsing DC magnetron sputtering - Archive ouverte HAL
Autre Publication Scientifique Année : 2013

Improvement of the mechanical and tribological properties of Cr-N system obtained by reactive gas pulsing DC magnetron sputtering

Résumé

Improvement of the mechanical and tribological properties of Cr-N system obtained by reactive gas pulsing DC magnetron sputtering

Domaines

Micro et nanotechnologies/Microélectronique

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https://hal.science/hal-00944583

Soumis le : lundi 10 février 2014-17:23:27

Dernière modification le : jeudi 21 novembre 2024-11:05:36

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Dates et versions

hal-00944583 , version 1 (10-02-2014)

Identifiants

  • HAL Id : hal-00944583 , version 1

Citer

Amel Zairi, Corinne Nouveau, Alain Iost, Nicolas Martin, Ahmed Ben Cheikh Larbi, et al.. Improvement of the mechanical and tribological properties of Cr-N system obtained by reactive gas pulsing DC magnetron sputtering. 2013. ⟨hal-00944583⟩

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