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Journal Articles Microelectronic Engineering Year : 2013

Dimensional characterization of biperiodic imprinted structures using optical scatterometry

I. Gereige
  • Function : Author
D. Pietroy
J. Eid
  • Function : Author
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hal-00941606 , version 1 (04-02-2014)

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  • HAL Id : hal-00941606 , version 1

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I. Gereige, D. Pietroy, J. Eid, C. Gourgon. Dimensional characterization of biperiodic imprinted structures using optical scatterometry. Microelectronic Engineering, 2013, 112, pp.27-30. ⟨hal-00941606⟩
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