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Communication Dans Un Congrès Année : 2002

Making high performance silicon devices on low temperature substrates

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hal-00936178 , version 1 (24-01-2014)

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  • HAL Id : hal-00936178 , version 1

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Tayeb Mohammed-Brahim, Olivier Bonnaud. Making high performance silicon devices on low temperature substrates. Invited Paper, SBMicro'2002, 17 th Symposium on Microelectronics Technology and Devices, Sep 2002, Porto Alegre, Brazil. ⟨hal-00936178⟩
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