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Communication Dans Un Congrès Année : 2003

Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics

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hal-00914161 , version 1 (04-12-2013)

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  • HAL Id : hal-00914161 , version 1

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Gabriel Girard, D. Daineka, Pavel Bulkin, J.E. Bouree. Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics. Proc. SPIE 4944, 2003, Belgium. pp.62. ⟨hal-00914161⟩
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