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Article Dans Une Revue physica status solidi (c) Année : 2010

Plasma emission diagnostics during fast deposition of microcrystalline silicon thin films in matrix distributed electron cyclotron resonance plasma CVD system

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hal-00913544 , version 1 (03-12-2013)

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  • HAL Id : hal-00913544 , version 1

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S. K. Ram, Laurent Kroely, Samir Kasouit, Pavel Bulkin, P. Roca I Cabarrocas. Plasma emission diagnostics during fast deposition of microcrystalline silicon thin films in matrix distributed electron cyclotron resonance plasma CVD system. physica status solidi (c), 2010, pp.553-556. ⟨hal-00913544⟩
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