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Communication Dans Un Congrès IEEE ISCDG Année : 2013

New architecture of MEMS microphone for enhanced performances

Résumé

This paper describes the conception, designs consideration and fabrication process of a novel MEMS microphone. The presented microphone not only uses a new architecture, the sensitive part being beams moving within the plane of the substrate, but also uses an innovative detection means with Silicon piezo-resistive nanogauges. Modelization will consider acoustic and mechanical interactions. Besides, at MEMS scale, accurate simulation of the sensor must take into account thermal and viscous boundary layers in acoustics, and we will show that the presented sensor takes benefit from these short scale effects, which leads to achieve theoretical resolution as low as 24dB.
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Dates et versions

hal-00903737 , version 1 (18-02-2021)

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Jaroslaw Czarny, Arnaud Walther, B. Desloges, Philippe Robert, Emmanuel Redon, et al.. New architecture of MEMS microphone for enhanced performances. 2013 International Semiconductor Conference Dresden-Grenoble, ISCDG 2013, Sep 2013, Dresden, Germany. pp.1-4, ⟨10.1109/ISCDG.2013.6656312⟩. ⟨hal-00903737⟩
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