Polarimetric interferometer for nanoscale positioning applications - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Review of Scientific Instruments Année : 2008

Polarimetric interferometer for nanoscale positioning applications

Résumé

We propose and demonstrate a displacement control method at the subnanometric scale based on a Michelson interferometer combined with a polarimeter and a phase-locked loop electronic board. Step by step displacements with a step value of 5 nm are presented. A repeatability of 0.47 nm is obtained from back and forth displacements over 1 m range. We show that a residual ellipticity of less than 10° on the polarization state leads to a positioning error of less than 1 nm. Such system could be used over millimeter range displacements in a controlled surrounding environment leading to numerous applications in nanometrology.
Fichier principal
Vignette du fichier
RSINAK7912125104_1.pdf (534.28 Ko) Télécharger le fichier
Origine : Fichiers éditeurs autorisés sur une archive ouverte

Dates et versions

hal-00830878 , version 1 (05-06-2013)

Identifiants

Citer

Suan Xu, Karim Ouedraogo, Luc Chassagne, Suat Topsu, Patrick Juncar, et al.. Polarimetric interferometer for nanoscale positioning applications. Review of Scientific Instruments, 2008, 79, pp.125104. ⟨10.1063/1.3053224⟩. ⟨hal-00830878⟩
38 Consultations
126 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More