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Article Dans Une Revue Review of Scientific Instruments Année : 2010

Multiscale scanning probe microscopy

Résumé

Combining the nanoscopic and macroscopic worlds is a serious challenge common to numerous scientific fields, from physics to biology. In this paper, we demonstrate nanometric resolution over a millimeter range by means of atomic-force microscopy using metrological stage. Nanometric repeatability and millimeter range open up the possibility of probing components and materials combining multiscale properties i.e., engineered nanomaterials. Multiscale probing is not limited to atomic-force microscopy and can be extended to any type of scanning probe technique in nanotechnology, including piezoforce microscopy, electrostatic-force microscopy, and scanning near-field optical microscopy.
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Dates et versions

hal-00830875 , version 1 (05-06-2013)

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Luc Chassagne, Sylvain Blaize, Pascal Ruaux, Suat Topsu, Pascal Royer, et al.. Multiscale scanning probe microscopy. Review of Scientific Instruments, 2010, 81, pp.086101. ⟨10.1063/1.3473935⟩. ⟨hal-00830875⟩
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