Journal Articles
Microelectronic Engineering
Year : 2011
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https://hal.science/hal-00795914
Submitted on : Friday, March 1, 2013-10:17:56 AM
Last modification on : Friday, March 24, 2023-2:52:56 PM
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X.Q. Bao, Thomas Dargent, Sébastien Grondel, J.B. Paquet, Eric Cattan. Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot. Microelectronic Engineering, 2011, 88, pp.2218-2224. ⟨10.1016/j.mee.2011.01.065⟩. ⟨hal-00795914⟩
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