Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot - Archive ouverte HAL Access content directly
Journal Articles Microelectronic Engineering Year : 2011

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hal-00795914 , version 1 (01-03-2013)

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X.Q. Bao, Thomas Dargent, Sébastien Grondel, J.B. Paquet, Eric Cattan. Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot. Microelectronic Engineering, 2011, 88, pp.2218-2224. ⟨10.1016/j.mee.2011.01.065⟩. ⟨hal-00795914⟩
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