Conference Papers
Year : 2013
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https://hal.science/hal-00795358
Submitted on : Wednesday, February 27, 2013-8:58:15 PM
Last modification on : Monday, March 17, 2025-7:30:19 PM
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- HAL Id : hal-00795358 , version 1
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Martin Heinisch, Erwin Reichel, T. Voglhuber-Brunnmaier, W. Hortschitz, M. Stifter, et al.. Wire based and micromachined U_shaped cantilever devices for viscosity and mass density sensing for measurements in a frequency range of 100Hz to 100kHz. 10th International Workshop on Nanomechanical Cantilever Sensors, 2013, Stanford, United States. 2 p. ⟨hal-00795358⟩
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