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Article Dans Une Revue IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control Année : 2012

Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications

S. Guillon
  • Fonction : Auteur
Daisuke Saya
L. Mazenq
J. Costecalde
  • Fonction : Auteur
Caroline Soyer
Liviu Nicu
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hal-00788342 , version 1 (14-02-2013)

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S. Guillon, Daisuke Saya, L. Mazenq, J. Costecalde, Denis Remiens, et al.. Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2012, 59, pp.1955-1961. ⟨10.1109/TUFFC.2012.2413⟩. ⟨hal-00788342⟩
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