3D MEMS-based tactile vibration sensor for measurement on lightweight objects
Résumé
This study deals with a micromachined vibration sensor for measuring mechanical vibration amplitudes of lightweight objects working in [1-5] kHz frequency range. The device is composed of an elastic pillar which will be in contact with a vibrating object and will transmit its vibrations. The pillar will be attached to a circular membrane provided with several strain gauges. Due to the object vibrations, the membrane and the gauges will be deformed and will convert the vibrations to variations of the electric charge.