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Communication Dans Un Congrès Année : 2012

Sensitive detection of nonlinear nanomechanical motion using capacitive signal down-mixing for resonant NEMS-based sensors

Résumé

Nanoelectromechanical systems (NEMS) are emerging as strong candidates for a host of important applications in semiconductor-based technology and fundamental science. At this level of miniaturization, the electric characterization of capacitive NEMS is a challenge. In fact, the high-frequency signals are normally cut off due to the limited bandwidth of the readout circuitry dominated by stray capacitance between the large amplifier and the high impedance tunneling junction. In order to overcome such limitations, some methods have been suggested: using several amplifier stages, inserting an LC resonator, or the scanning tunneling microscopy down-mixing readout technique. Nevertheless, these methods are efficient only at oscillations below the critical amplitude due to nonlinearities which induce noise mixing. In the present paper, a new characterization technique for resonant NEMS based on capacitive down-mixing has been developed and applied to M&NEMS accelerometers. The considered method is highly sensitive and permits a simple tuning of the signal to nonlinearity ratio.
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Dates et versions

hal-00759398 , version 1 (15-11-2019)

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  • HAL Id : hal-00759398 , version 1

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Najib Kacem, Sébastien Hentz, Sébastien Baguet, Régis Dufour. Sensitive detection of nonlinear nanomechanical motion using capacitive signal down-mixing for resonant NEMS-based sensors. Nanotech 2012 NSTI Nanotechnology Conference and Expo, Jun 2012, Santa Clara, California, United States. pp.223-226. ⟨hal-00759398⟩
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