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Communication Dans Un Congrès Année : 2012

Development and limitations of microplasma arrays on silicon operating in DC

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hal-00747741 , version 1 (01-11-2012)

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  • HAL Id : hal-00747741 , version 1

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Remi Dussart, Mukesh Kulsreshath, Laurent Schwaederlé, Valentin Felix, Philippe Lefaucheux, et al.. Development and limitations of microplasma arrays on silicon operating in DC. AVS 59th International Symposium and Exhibition, Oct 2012, United States. ⟨hal-00747741⟩
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