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On the direct bonding of two silicon surfaces: experiments and modeling

Abstract

Silicon direct bonding is a well known process in optic. In this communication we will present principles of molecular adhesion, chemical and mechanical characterization of the interface and a numerical study to predict the mechanical resistance of assemblies.
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Dates and versions

hal-00740759 , version 1 (10-10-2012)

Identifiers

  • HAL Id : hal-00740759 , version 1

Cite

Natacha Cocheteau, Frédéric Lebon, Iulian Rosu, Sonia Ait Zaid, Isabelle Savin de Larclause. On the direct bonding of two silicon surfaces: experiments and modeling. Mechanics of Nano, Micro and Macro Composite Structures, Jun 2012, Turin, Italy. ⟨hal-00740759⟩
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