Three-dimensional high-resolution quantitative microscopy of extended crystals
Résumé
Hard X-ray lens-less microscopy raises hopes for a non-invasive quantitative imaging, capable
of achieving the extreme resolving power demands of nanoscience. However, a limit imposed
by the partial coherence of third generation synchrotron sources restricts the sample size to
the micrometer range. Recently, X-ray ptychography has been demonstrated as a solution for
arbitrarily extending the fi eld of view without degrading the resolution. Here we show that
ptychography, applied in the Bragg geometry, opens new perspectives for crystalline imaging.
The spatial dependence of the three-dimensional Bragg peak intensity is mapped and the entire
data subsequently inverted with a Bragg-adapted phase retrieval ptychographical algorithm.
We report on the image obtained from an extended crystalline sample, nanostructured from
a silicon-on-insulator substrate. The possibility to retrieve, without transverse size restriction,
the highly resolved three-dimensional density and displacement fi eld will allow for the
unprecedented investigation of a wide variety of crystalline materials, ranging from life science
to microelectronics.
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