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Communication Dans Un Congrès Année : 2012

Nanogap MEMS micro-relay with 70 ns swithing speed

Aurélie Verger
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Arnaud Pothier
Cyril Guines
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Aurelian Crunteanu
Pierre Blondy
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J. Dehnnin
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Olivier Vendier
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Résumé

This paper presents Micro-electro-mechanical relays for very fast switching applications. Prototype relays have been fabricated tested and demonstrated reconfiguration capabilities as fast as 70 ns with a 300 ns additional settling time once electrical contact is fully stabilized. Such switching speed has been previously demonstrated on capacitive RF-MEMS switches, but this is the first time that such a fast mechanical switching is reported on relays, i.e. ohmic contact switches. The ability to open or close a contact at such speed can lead to many applications such as ultra low power electromechanical computing, or harsh environment electronics.
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Dates et versions

hal-00734097 , version 1 (20-09-2012)

Identifiants

Citer

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Nanogap MEMS micro-relay with 70 ns swithing speed. IEEE MEMS 2012 Conférence, Jan 2012, Paris, France. pp.717 - 720, ⟨10.1109/MEMSYS.2012.6170192⟩. ⟨hal-00734097⟩
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