Bragg reflector formed on oxidized porous silicon
Résumé
The manufacturing of a porous silicon Bragg reflector on P+ silicon substrate is investigated and the effects of oxidation on the Bragg reflector parameters is studied, notably the shift of the central wavelength after oxidation. This Letter shows how to anticipate the changes due to oxi- dation rather than to endure them. First, the variations in the refractive index and thickness after oxidation were studied. Then, from these measurements, an oxidised porous silicon Bragg