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Communication Dans Un Congrès Année : 2011

Direct energy influx measurements between a biased substrate and a low pressure plasma

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hal-00707930 , version 1 (13-06-2012)

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  • HAL Id : hal-00707930 , version 1

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Pierre-Antoine Cormier, Anne-Lise Thomann, Remi Dussart, Nadjib Semmar, Jacky Mathias. Direct energy influx measurements between a biased substrate and a low pressure plasma. 18th International Colloquium on Plasma Processes (CIP), Jul 2011, Nantes, France. ⟨hal-00707930⟩
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