Controlled Sampling of Nanoparticles in Reactive Plasmas
Résumé
Reactive RF plasmas are an excellent source for the production of nanoparticles. The field of application of nanoparticles is nowadays rapidly growing, as well as the request for investigations on the nanoparticle material itself. Thus, we deal with the emerging need for targeted sampling of nanoparticles from the plasma. We developed a sampling system based on the effect of thermophoresis on the transport of nanoparticles within the plasma bulk.