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Communication Dans Un Congrès Année : 2012

Decision making based on the EHF integration in a complex semiconductor manufacturing

Résumé

These days, improved equipment availability is a critical factor in the competitiveness of microelectronics fabs. Production facilities and metrology have very significant investment costs and they are operated at the limit of their capabilities. The production context is characterized by its high complexity which is defined by the interaction flows between production equipment and its environment (Fig. 1). During equipment downtimes, operators analyze a limited number of parameters and their evolution to decide which test procedures and actions to take. Unfortunately, the relevance of these procedures and actions is not guaranteed; hence new modeling methods must be able to define related and useable indicators to improve equipments efficiency and maintenance activities. The Equipment Health Factor (EHF) is a new indicator that can be used to predict the production equipment drifts [1]. EHF is based on the analysis of historical operational data coming from: equipment parameters, maintenance and SPC. The aim of this work is to propose a progressive approach to integrate the EHF results in the definition of decision support strategies on the maintenance tasks. Also, several methods and tools are recommended in order to increase semiconductor industry performance in terms of cycle time, costs and yield in a complex production context.
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Dates et versions

hal-00688997 , version 1 (19-04-2012)

Identifiants

  • HAL Id : hal-00688997 , version 1

Citer

Mohammed Farouk Bouaziz, M'Hammed Sahnoun, Éric Zamaï, S. Hubac. Decision making based on the EHF integration in a complex semiconductor manufacturing. 12th European Advanced Process Control and Manufacturing Conference (APCM 2012), Apr 2012, MINATEC Grenoble,, France. N°306, pp 205 - 210. ⟨hal-00688997⟩
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