Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD. - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Surface and Coatings Technology Année : 2010

Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD.

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hal-00677652 , version 1 (09-03-2012)

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  • HAL Id : hal-00677652 , version 1

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C. Chouquet, Guillaume Gerbaud, M. Bardet, S. Barrat, Alain Billard, et al.. Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD.. Surface and Coatings Technology, 2010, 204 (9-10), pp.1339-1346. ⟨hal-00677652⟩
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