Interpretation of the two-components observed in high resolution X-ray diffraction ω scan peaks for mosaic ZnO thin fi lms grown on c-sapphire substrates using pulsed laser deposition - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Thin Solid Films Année : 2011

Interpretation of the two-components observed in high resolution X-ray diffraction ω scan peaks for mosaic ZnO thin fi lms grown on c-sapphire substrates using pulsed laser deposition

Résumé

X-ray scattering methods were applied to the study of thin mosaic ZnO layers deposited on c-Al 2 O 3 substrates using Pulsed Laser Deposition. High Resolution (HR) studies revealed two components in the ω scans (transverse scans) which were not resolved in conventional "open-detector" ω rocking curves: a narrow, resolution-limited, peak, characteristic of long-range correlation, and a broad peak, attributed to defect- related diffuse-scattering inducing a limited transverse structural correlation length. Thus, for such mosaic fi lms, the conventional ω rocking curve Full Width at Half Maximum linewidth was found to be ill-adapted as an overall fi gure-of-merit for the structural quality, in that the different contributions were not meaningfully represented. A "Williamson-Hall like" integral breadth (IB) metric for the HR (00.l) transverse-scans was thus developed as a reliable, fast, accurate and robust alternative to the rocking curve linewidth for routine non- destructive testing of such mosaic thin fi lms. For a typical ZnO/c-Al 2 O 3 fi lm, the IB method gave a limited structural correlation length of 110 nm±9 nm. The results are coherent with a thin fi lm containing mis fi t dislocations at the fi lm-substrate interface.

Dates et versions

hal-00662642 , version 1 (24-01-2012)

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Olivier Durand, Antoine Létoublon, D. J. Rogers, F. Hosseini Teherani. Interpretation of the two-components observed in high resolution X-ray diffraction ω scan peaks for mosaic ZnO thin fi lms grown on c-sapphire substrates using pulsed laser deposition. Thin Solid Films, 2011, 519, pp.6369. ⟨10.1016/j.tsf.2011.04.036⟩. ⟨hal-00662642⟩
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