Thermal conductivity measurement of porous silicon by the pulsed-photothermal method - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Physics D: Applied Physics Année : 2011

Thermal conductivity measurement of porous silicon by the pulsed-photothermal method

Résumé

Thermal properties of two types of porous silicon are studied using the pulsed-photothermal method (PPT). This method is based on a pulsed-laser source in the nanosecond regime. A 1D analytical model is coupled with the PPT technique in order to determinate thermal properties of the studied samples (thermal conductivity and volumetric heat capacity). At rst, a bulk single crystal silicon sample and a titanium thin lm deposited on a single crystal silicon substrate are studied in order to validate the PPT method. Porous silicon samples are elaborated with two dierent techniques, the sintering technique for macroporous silicon and electrochemical etching method for mesoporous silicon. Metallic thin lms are deposited on these two substrates by magnetron sputtering. Finally, the thermal properties of macroporous (30% of porosity and pores diameter between 100 nm and 1000 nm) and mesoporous silicon (30% and 15% of porosity and pores diameter between 5 nm and 10 nm) are determined in this work and it is found that thermal conductivity of macroporous (73 W.m -1 .K -1) and mesoporous (between 80 and 50 W.m -1 .K -1) silicon is two times lower than the single crystal silicon (140 W.m -1 .K -1).
Fichier principal
Vignette du fichier
PEER_stage2_10.1088%2F0022-3727%2F44%2F35%2F355401.pdf (6.19 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-00649058 , version 1 (07-12-2011)

Identifiants

Citer

E Amin-Chalhoub, N Semmar, L Coudron, G Gautier, C Boulmer-Leborgne, et al.. Thermal conductivity measurement of porous silicon by the pulsed-photothermal method. Journal of Physics D: Applied Physics, 2011, 44 (35), pp.355401. ⟨10.1088/0022-3727/44/35/355401⟩. ⟨hal-00649058⟩

Collections

IMRB PEER UPEC
63 Consultations
217 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More