Real-time in situ Mueller matrix ellipsometry of GaSb nanopillars: observation of anisotropic local alignment - Archive ouverte HAL
Article Dans Une Revue Optics Express Année : 2011

Real-time in situ Mueller matrix ellipsometry of GaSb nanopillars: observation of anisotropic local alignment

Résumé

The formation of GaSb nanopillars by low energy ion sputtering is studied in real-time by spectroscopic Mueller matrix ellipsometry, from the initial formation in the smooth substrate until nanopillars with a height of 200 - 300 nm are formed. As the nanopillar height increased above 100 nm, coupling between orthogonal polarization modes was observed. Ex situ angle resolved Mueller polarimetry measurements revealed a 180 degrees azimuth rotation symmetry in the off-diagonal Mueller elements, which can be explained by a biaxial material with different dielectric functions epsilon(x) and epsilon(y) in a plane parallel to the substrate. This polarization coupling can be caused by a tendency for local direction dependent alignment of the pillars, and such a tendency is confirmed by scanning electron microscopy. Such observations have not been made for GaSb nanopillars shorter than 100 nm, which have optical properties that can be modeled as a uniaxial effective medium

Dates et versions

hal-00647066 , version 1 (01-12-2011)

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Citer

Ingar Stian Nerbo, Sébastien Le Roy, Martin Foldyna, Elin Sondergard, Morten Kildemo. Real-time in situ Mueller matrix ellipsometry of GaSb nanopillars: observation of anisotropic local alignment. Optics Express, 2011, 19 (13), pp.12551-12561. ⟨10.1364/OE.19.012551⟩. ⟨hal-00647066⟩
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