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Communication Dans Un Congrès Année : 2010

Synchronized pulsed plasmas: potential process improvements for patterning technologies

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hal-00625370 , version 1 (21-09-2011)

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  • HAL Id : hal-00625370 , version 1

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M. Haass, Maxime Darnon, E. Pargon, G. Cunge, S. Banna, et al.. Synchronized pulsed plasmas: potential process improvements for patterning technologies. 63rd Gaseous Electronic Conference and 7th International Conference on Reactive Plasmas, Oct 2010, Paris, France. ⟨hal-00625370⟩
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