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Communication Dans Un Congrès Année : 2010

AlN thin films deposited by pulsed laser deposition (PLD) for microelectronic devices

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hal-00619648 , version 1 (06-09-2011)

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  • HAL Id : hal-00619648 , version 1

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Perrine Dutheil, Corinne Champeaux, Gilles Trolliard, Jean-Christophe Orlianges, Matthieu Chatras, et al.. AlN thin films deposited by pulsed laser deposition (PLD) for microelectronic devices. EMRS Spring Meeting, Symposium R : Laser processing and diagnostics for micro and nano applications, Congress Center, Jun 2010, Strasbourg, France. ⟨hal-00619648⟩
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