Journal Articles Journal of Applied Physics Year : 2010
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hal-00609945 , version 1 (20-07-2011)

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  • HAL Id : hal-00609945 , version 1

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O. Gourhant, G. Gerbaud, A. Zenasni, L. Favennec, P. Gonon, et al.. Crosslinking of porous SiOCH films involving Si-O-C bonds: Impact of deposition and curing. Journal of Applied Physics, 2010, pp.108, 124105. ⟨hal-00609945⟩
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