Journal Articles
Journal of Applied Physics
Year : 2010
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https://hal.science/hal-00609945
Submitted on : Wednesday, July 20, 2011-3:30:49 PM
Last modification on : Saturday, September 27, 2025-7:36:30 PM
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- HAL Id : hal-00609945 , version 1
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O. Gourhant, G. Gerbaud, A. Zenasni, L. Favennec, P. Gonon, et al.. Crosslinking of porous SiOCH films involving Si-O-C bonds: Impact of deposition and curing. Journal of Applied Physics, 2010, pp.108, 124105. ⟨hal-00609945⟩
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