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Article Dans Une Revue Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces Année : 2011

Coherent scattering from silicon monocrystal surface

Résumé

Using coherent X-ray scattering, we evidenced atomic step roughness at the (111) vicinal surface of a silicon monocrystal of 0.05° miscut. Close to the anti-Bragg position of the reciprocal space which is particularly sensitive to the (111) surface, the truncation rod exhibits a contrasted speckle pattern that merges into a single peak closer to the 111 Bragg peak of the bulk. The elongated shape of the speckles along the (111) direction confirms the monoatomic step sensitivity of the technique. This experiment opens the way towards studies of step dynamics on crystalline surfaces.

Domaines

Matériaux

Dates et versions

hal-00602227 , version 1 (21-06-2011)

Licence

Paternité - Pas d'utilisation commerciale

Identifiants

Citer

F. Livet, G. Beutier, M. de Boissieu, S. Ravy, F. Picca, et al.. Coherent scattering from silicon monocrystal surface. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2011, 605, pp.390-395. ⟨10.1016/j.susc.2010.11.006⟩. ⟨hal-00602227⟩
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