Communication Dans Un Congrès Année : 2011

Structural properties of SiOxNy containing silicon nanoparticles deposited by ECR-PECVD

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hal-00598306 , version 1 (06-06-2011)

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  • HAL Id : hal-00598306 , version 1

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G. Ferblantier, F. Ehrhardt, F. Delachat, Marzia Carrada, A. Slaoui. Structural properties of SiOxNy containing silicon nanoparticles deposited by ECR-PECVD. European Material Research Society (E-MRS) Spring Conference, Symposium on Synthesis, Processing & Characterization of Nanoscale Multi Functional Oxide Films, May 2011, Nice, France. ⟨hal-00598306⟩
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