A Terahertz (THz) dedicated microsystem is presented. Design, microfabrication and subTHz (0.5-0.11THz) measurements are shown in this article. Ethanol/Water mixtures measurements analysis show that THz spectroscopy is able to characterize hydration shells of a solute in water, in term of absorption, volume or hydration number. Moreover, first measurements with proteins in the microsystem show that lysozym concentration detection is possible